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Diffusion pumps, cryopumps and adsorption pumps
Diffusion pumps, cryopumps and adsorption pumps (excl. pumps used in semiconductor or flat panel display production)
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Vacuum pumps (excl. pumps used in semiconductor or flat panel display production, rotary piston pumps, sliding vane rotary pumps, molecular drag pumps, roots pumps, diffusion pumps, cryopumps and adsorption pumps)
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