Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in note 11(c) to this chapter; parts and accessories
Machines and apparatus for the manufacture of boules or wafers
Machines and apparatus for the manufacture of flat panel displays
Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits
Machines and apparatus specified in note 11 c to chapter 84
Parts and accessories for machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays, and for machines and apparatus specified in note 9 c to chapter 84, n.e.s.